Open AccessSynthesis of silicon oxide microropes on the copper substrate with SiO2 interlayer
Author(s) -
Е. А. Баранов,
S. Ya. Khmel,
A. O. Zamchiy,
E. N. Shatskiy
Publication year - 2017
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/925/1/012018
Subject(s) - silicon , materials science , substrate (aquarium) , oxide , silicon oxide , copper , layer (electronics) , copper oxide , deposition (geology) , chemical engineering , nanowire , nanotechnology , plasma , optoelectronics , metallurgy , paleontology , oceanography , silicon nitride , sediment , engineering , biology , geology , physics , quantum mechanics