Open AccessVapor Deposition Polymerization and Molecular Orientation of Polyimide Thin Films
Author(s) -
Yamazaki Takatoshi,
Chanya Mahapun,
Satoshi Usui,
Kuniaki Tanaka,
Hiroaki Usui
Publication year - 2017
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/924/1/012017
Subject(s) - polyimide , materials science , pyromellitic dianhydride , thin film , polymerization , monolayer , monomer , chemical engineering , chemical vapor deposition , annealing (glass) , polymer chemistry , polymer , layer (electronics) , composite material , nanotechnology , engineering