Open AccessMiniaturization of Compensational Spring System using the Highly Nonlinear Curved beams in MEMS
Author(s) -
Bogdan Vysotskyi,
Denis Aubry,
P. Gaucher,
Élie Lefeuvre,
Xavier Le Roux,
Fabien Parrain
Publication year - 2017
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/922/1/012012
Subject(s) - miniaturization , spring (device) , microelectromechanical systems , nonlinear system , displacement (psychology) , finite element method , fabrication , mechanical engineering , structural engineering , materials science , engineering , physics , nanotechnology , psychology , medicine , alternative medicine , pathology , quantum mechanics , psychotherapist