Open AccessResistive contact MEMS switch in a “hot” operation mode
Author(s) -
Ilia V. Uvarov,
В. В. Наумов,
A. N. Kupriyanov,
Olga Koroleva,
E. I. Vaganova,
I. I. Amirov
Publication year - 2017
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/917/8/082001
Subject(s) - microelectromechanical systems , resistive touchscreen , electrode , materials science , voltage , contact resistance , electrical contacts , finite element method , electrical engineering , optoelectronics , engineering , nanotechnology , structural engineering , physics , layer (electronics) , quantum mechanics