Open AccessInvestigation of electrical and optical properties of low temperature titanium nitride grown by rf-magnetron sputtering
Author(s) -
D Sosnin,
D. A. Kudryashov,
А. М. Можаров
Publication year - 2017
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/917/5/052025
Subject(s) - titanium nitride , materials science , tin , ohmic contact , optoelectronics , sputtering , titanium , sputter deposition , nitride , electrical resistivity and conductivity , cavity magnetron , thin film , metallurgy , composite material , layer (electronics) , nanotechnology , electrical engineering , engineering