Open AccessComparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene
Author(s) -
I. E. Clemente,
A. V. Miakonkikh,
О. В. Кононенко,
V. N. Matveev,
К. В. Руденко
Publication year - 2017
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/917/3/032039
Subject(s) - graphene , atomic layer deposition , materials science , raman spectroscopy , deposition (geology) , nucleation , layer (electronics) , oxide , graphene oxide paper , plasma , graphene nanoribbons , graphene foam , analytical chemistry (journal) , chemical engineering , nanotechnology , chemistry , metallurgy , optics , environmental chemistry , paleontology , physics , engineering , quantum mechanics , sediment , organic chemistry , biology