Open AccessEquipment for the deposition of thin films of carbon in the conditions of magnetron sputtering and influences of radiation
Author(s) -
А. V. Kostanovskiy,
А. А. Пронкин,
M. G. Zeodinov,
M. E. Kostanovskaya
Publication year - 2017
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/891/1/012307
Subject(s) - x ray photoelectron spectroscopy , materials science , carbon fibers , sputter deposition , diamond , carbon film , thin film , diamond like carbon , substrate (aquarium) , analytical chemistry (journal) , graphite , sputtering , chemical engineering , nanotechnology , chemistry , composite material , organic chemistry , oceanography , geology , composite number , engineering