Open AccessElectro-physical and mechanical properties of films based on zirconium oxide in sensitive elements of MEMS
Author(s) -
N. Korobova,
С. П. Тимошенков
Publication year - 2017
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/857/1/012020
Subject(s) - microsystem , materials science , microelectromechanical systems , zirconium , oxide , thermal shock , thermal stability , shock (circulatory) , metrology , nanotechnology , composite material , mechanical engineering , metallurgy , engineering , chemical engineering , optics , medicine , physics