Open AccessStudy of the wear resistance of ion-plasma coatings based on titanium and aluminum and obtained by magnetron sputtering
Author(s) -
Г. В. Качалин,
А. Ф. Медников,
А. Б. Тхабисимов,
С. В. Сидоров
Publication year - 2017
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/857/1/012016
Subject(s) - materials science , tin , titanium nitride , metallurgy , titanium , aluminium , nitride , sputter deposition , sputtering , cavity magnetron , plasma , composite material , layer (electronics) , thin film , nanotechnology , physics , quantum mechanics