Open AccessThe impact of purging on the quality of AlGaN/GaN multiple quantum wells grown on AlN/sapphire template
Author(s) -
Shuchang Wang,
Xiong Zhang,
Zili Wu,
Jianguo Zhao,
Qian Dai,
Yiping Cui
Publication year - 2017
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/844/1/012015
Subject(s) - sapphire , metalorganic vapour phase epitaxy , materials science , dislocation , chemical vapor deposition , quantum well , optoelectronics , layer (electronics) , scanning electron microscope , ultraviolet , barrier layer , diffraction , epitaxy , nanotechnology , optics , laser , composite material , physics