Open AccessInvestigation of porous Si formed by metal-assisted chemical etching with Au as catalystOpen AccessAuthor(s)
O. Pyatilova,
Sergey Gavrilov,
A. I. Savitskiy,
Alexander N. Dudin,
Alexey N. Pavlov,
Yu. I. Shilyaeva
Publication year2017
Publication title
journal of physics: conference series
Resource typeJournals
Subject(s)catalysis , chemical engineering , chemical kinetics , chemical reaction , chemistry , composite material , engineering , etching (microfabrication) , isotropic etching , kinetics , layer (electronics) , materials science , metal , metallurgy , mineralogy , organic chemistry , physics , porosity , quantum mechanics , thermodynamics , work (physics)
Language(s)English
SCImago Journal Rank0.21
H-Index85
ISSN1742-6588
DOI10.1088/1742-6596/829/1/012006
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