Open AccessInvestigation of porous Si formed by metal-assisted chemical etching with Au as catalyst
Author(s) -
O. V. Pyatilova,
С. А. Гаврилов,
Andrey Savitskiy,
А. А. Дудин,
Alexander A. Pavlov,
Yu. I. Shilyaeva
Publication year - 2017
Publication title -
journal of physics conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/829/1/012006
Subject(s) - etching (microfabrication) , porosity , materials science , catalysis , chemical engineering , isotropic etching , kinetics , metal , layer (electronics) , chemical reaction , chemical kinetics , work (physics) , nanotechnology , composite material , metallurgy , chemistry , thermodynamics , organic chemistry , physics , quantum mechanics , engineering
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