open-access-imgOpen AccessInvestigation of porous Si formed by metal-assisted chemical etching with Au as catalyst
O. Pyatilova,
Sergey Gavrilov,
A. I. Savitskiy,
Alexander N. Dudin,
Alexey N. Pavlov,
Yu. I. Shilyaeva
Publication year2017
Publication title
journal of physics: conference series
Resource typeJournals
Subject(s)catalysis , chemical engineering , chemical kinetics , chemical reaction , chemistry , composite material , engineering , etching (microfabrication) , isotropic etching , kinetics , layer (electronics) , materials science , metal , metallurgy , mineralogy , organic chemistry , physics , porosity , quantum mechanics , thermodynamics , work (physics)
SCImago Journal Rank0.21

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