Open AccessSimulation of rarefied low pressure RF plasma flow around the sample
Author(s) -
В. С. Желтухин,
A. Yu. Shemakhin
Publication year - 2017
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/789/1/012071
Subject(s) - plasma , electron temperature , boltzmann equation , jet (fluid) , ionization , electron , atomic physics , flow (mathematics) , boundary value problem , mechanics , boltzmann constant , plasma parameters , materials science , computational physics , physics , ion , thermodynamics , nuclear physics , quantum mechanics