Open AccessCurrent–pressure dependencies of dc magnetron discharge in inert gases
Author(s) -
A. O. Serov,
Yu. A. Mankelevich,
A. F. Paĺ,
A. N. Ryabinkin
Publication year - 2016
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/774/1/012150
Subject(s) - cathode , cavity magnetron , atomic physics , plasma , ion , inert gas , electron , voltage , current (fluid) , discharge pressure , chemistry , materials science , analytical chemistry (journal) , sputtering , physics , thin film , thermodynamics , nanotechnology , gas compressor , organic chemistry , chromatography , quantum mechanics