Open AccessMEMS ion-sorption high vacuum pump
Author(s) -
Tomasz Grzebyk,
Paweł Knapkiewicz,
Piotr Szyszka,
Anna Górecka-Drzazga,
Jan Dziuban
Publication year - 2016
Publication title -
journal of physics. conference series
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/773/1/012047
Subject(s) - micropump , microelectromechanical systems , sorption , vacuum pump , materials science , volume (thermodynamics) , ion , magnetic field , electrode , ultra high vacuum , field (mathematics) , optoelectronics , mechanical engineering , nanotechnology , chemistry , thermodynamics , physics , engineering , organic chemistry , adsorption , quantum mechanics , mathematics , pure mathematics