Open AccessAtomic layer deposition of ZnO:Al on PAA substrates
Author(s) -
B. Blagoev,
E. Vlakhov,
Valentin Videkov,
Boriana Tzaneva,
G. Łuka,
B.S. Witkowski,
Penka Terziyska,
JeanLouis Leclercq,
T. Krajewski,
E. Guziewicz,
Dimitre Dimitrov,
V. Mehandzhiev,
P. Sveshtarov
Publication year - 2016
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/764/1/012004
Subject(s) - atomic layer deposition , materials science , scanning electron microscope , layer (electronics) , deposition (geology) , porosity , chemical engineering , ellipsometry , thin film , composite material , nanotechnology , paleontology , sediment , engineering , biology