Open AccessFabrication of micromirror-based magnetic sensor
Author(s) -
Zheng Cui,
Xudi Wang,
Yong Li,
Gui Yun Tian
Publication year - 2007
Publication title -
journal of physics. conference series
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/76/1/012033
Subject(s) - materials science , optics , wafer , permalloy , fabrication , stiction , surface micromachining , deflection (physics) , microelectromechanical systems , optoelectronics , magnetic field , physics , medicine , magnetization , alternative medicine , pathology , quantum mechanics