Open AccessCharacterizing coupled MEMS resonators with an electrical resonator
Author(s) -
Guowei Tao,
Bhaskar Choubey
Publication year - 2016
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/757/1/012017
Subject(s) - resonator , microelectromechanical systems , electronic engineering , materials science , electrical engineering , optoelectronics , engineering