Open AccessMagnetron sputtering of copper on thermosensitive polymer materials of the gas centrifuge rotors
Author(s) -
V. D. Borisevich,
Sergey Senchenkov,
D. M. Titov
Publication year - 2016
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/751/1/012013
Subject(s) - sputter deposition , materials science , coating , centrifuge , cavity magnetron , polymer , deposition (geology) , layer (electronics) , rotor (electric) , copper , sputtering , plasma , composite material , metallurgy , mechanical engineering , nanotechnology , thin film , geology , engineering , nuclear physics , paleontology , physics , sediment