Open AccessFacility and the method for MEIS analysis of layers redeposited in plasma devices
Author(s) -
D. G. Bulgadaryan,
D. V. Kolodko,
V. A. Kurnaev,
D. N. Sinelnikov
Publication year - 2016
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/748/1/012016
Subject(s) - plasma , computer science , physics , nuclear physics