Open AccessWriting of 3D optical integrated circuits with ultrashort laser pulses in the presence of strong spherical aberration
Author(s) -
М. А. Бухарин,
Nikolay N. Skryabin,
D. V. Khudyakov,
S. K. Vartapetov
Publication year - 2016
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/747/1/012054
Subject(s) - femtosecond , spherical aberration , optics , laser , materials science , lens (geology) , thermal , range (aeronautics) , optoelectronics , physics , meteorology , composite material