Open AccessMethod of magnetron target temperature evaluation by analysis of thermal radiation spectrum
Author(s) -
V. V. Gerasimov,
D. K. Kostrin,
L. M. Selivanov,
A. A. Uhov,
А. Е. Komlev,
E. S. Shutova
Publication year - 2016
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/729/1/012019
Subject(s) - radiation , cavity magnetron , thermal radiation , spectrum (functional analysis) , materials science , thermal , electromagnetic spectrum , temperature measurement , computational physics , optics , physics , thermodynamics , nanotechnology , thin film , quantum mechanics , sputtering