Open AccessMagnetron sputtering in rigid optical solar reflectors production
Author(s) -
O Asainov,
Dashi D. Bainov,
В. П. Кривобоков,
Dmitrii V. Sidelev
Publication year - 2016
Publication title -
journal of physics. conference series
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/729/1/012012
Subject(s) - materials science , sputter deposition , sputtering , indium tin oxide , evaporation , substrate (aquarium) , deposition (geology) , coating , absorption (acoustics) , optoelectronics , optical coating , optics , resistive touchscreen , cavity magnetron , tin , layer (electronics) , composite material , thin film , metallurgy , nanotechnology , physics , paleontology , oceanography , engineering , sediment , geology , biology , electrical engineering , thermodynamics