
Laser processing for bevel termination of high voltage pn junction in SiC
Author(s) -
Andrzej Kubiak,
Ł. Ruta,
Adam Rosowski,
P. French
Publication year - 2016
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/709/1/012005
Subject(s) - bevel , high voltage , materials science , laser , optoelectronics , electrical engineering , voltage , optics , mechanical engineering , engineering , physics