Open AccessStand for coating deposition and coating/materials testing
Author(s) -
A. A. Ayrapetov,
L. B. Begrambekov,
M Yu Dyachenko,
A. E. Evsin,
A V Grunin,
A. M. Kalachev,
Ya A Sadovskiy,
P. Shigin
Publication year - 2016
Publication title -
journal of physics conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/700/1/012041
Subject(s) - materials science , tungsten , coating , deposition (geology) , sputtering , ion , irradiation , plasma , sputter deposition , analytical chemistry (journal) , composite material , thin film , metallurgy , nanotechnology , chemistry , nuclear physics , paleontology , physics , organic chemistry , chromatography , sediment , biology
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