Research Library

open-access-imgOpen AccessStand for coating deposition and coating/materials testing
Author(s)
A. A. Ayrapetov,
L. B. Begrambekov,
M Yu Dyachenko,
A. E. Evsin,
A. V. Grunin,
A. M. Kalachev,
Ya. A. Sadovskiy,
P. Shigin
Publication year2016
Publication title
journal of physics. conference series
Resource typeJournals
PublisherIOP Publishing
Subject(s)analytical chemistry (journal) , biology , chemistry , chromatography , coating , composite material , deposition (geology) , ion , irradiation , materials science , metallurgy , nanotechnology , nuclear physics , organic chemistry , paleontology , physics , plasma , sediment , sputter deposition , sputtering , thin film , tungsten
Language(s)English
SCImago Journal Rank0.21
H-Index85
eISSN1742-6596
pISSN1742-6588
DOI10.1088/1742-6596/700/1/012041

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