Open AccessSpectroscopic measurements of ablation plasma generated with laser-driven intense extreme ultraviolet (EUV) light
Author(s) -
Nozomi Tanaka,
Kazuyoshi Hane,
Hirokazu Shikata,
M. Masuda,
K. Nagatomi,
Atsushi Sunahara,
Manabu Yoshida,
Shinsuke Fujioka,
H. Nishimura
Publication year - 2016
Publication title -
journal of physics conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/688/1/012122
Subject(s) - extreme ultraviolet lithography , extreme ultraviolet , plasma , ablation , laser ablation , laser , materials science , ultraviolet , kinetic energy , electron density , ion , spectral line , atomic physics , optics , chemistry , optoelectronics , physics , engineering , quantum mechanics , astronomy , aerospace engineering , organic chemistry
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