Open AccessFormation of low-frequency periodic structures in a pulsed magnetron discharge
Author(s) -
Andrey V. Kaziev,
G. V. Khodachenko,
M. M. Kharkov
Publication year - 2016
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/666/1/012024
Subject(s) - plasma , ionization , magnetic field , cavity magnetron , instability , atomic physics , wavelength , electric field , materials science , voltage , plasma parameters , computational physics , physics , optics , sputtering , ion , mechanics , thin film , quantum mechanics , nanotechnology