Open AccessOut-of-Plane Translational PZT Bimorph Actuator with Archimedes’ Spiral Actuating Tethers
Author(s) -
Chenye Yang,
Sanwei Liu,
California Livermore
Publication year - 2015
Publication title -
journal of physics. conference series
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/660/1/012028
Subject(s) - bimorph , actuator , finite element method , microelectromechanical systems , spiral (railway) , lead zirconate titanate , materials science , voltage , mechanical engineering , structural engineering , acoustics , engineering , optoelectronics , electrical engineering , physics , ferroelectricity , dielectric