Open AccessLow-Frequency MEMS Electrostatic Vibration Energy Harvester With Corona-Charged Vertical Electrets and Nonlinear Stoppers
Author(s) -
Yingxian Lu,
F. Cottone,
S. Boisseau,
Dimitri Galayko,
F. Marty,
Philippe Basset
Publication year - 2015
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/660/1/012003
Subject(s) - electret , materials science , capacitor , microelectromechanical systems , voltage , energy harvesting , hysteresis , corona discharge , vibration , electrode , optoelectronics , electrical engineering , bandwidth (computing) , biasing , electric potential energy , nonlinear system , corona (planetary geology) , acoustics , physics , power (physics) , telecommunications , composite material , engineering , condensed matter physics , quantum mechanics , astrobiology , venus
International audienceThis paper reports for the first time a MEMS electrostatic vibration energy harvester (e-VEH) with corona-charged vertical electrets on its electrodes. The bandwidth of the 1-cm2 device is extended in low and high frequencies by nonlinear elastic stoppers. With a bias voltage of 46 V (electret@21 V + DC external source@25 V) between the electrodes, the RMS power of the device reaches 0.89 μW at 33 Hz and 6.6 μW at 428 Hz. The -3dB frequency band including the hysteresis is 223~432 Hz, the one excluding the hysteresis 88~166 Hz. We also demonstrate the charging of a 47 μF capacitor used for powering a wireless and autonomous temperature sensor node with a data transmission beyond 10 m at 868 MHz