Open AccessMolecular beam epitaxial growth and characterization of defects induced by cavitation impacts on polysilicon thin films
Author(s) -
Dan O. Macodiyo,
Hitoshi Soyama,
Kazuo Hayashi
Publication year - 2007
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/61/1/150
Subject(s) - materials science , characterization (materials science) , cavitation , molecular beam epitaxy , epitaxy , thin film , optoelectronics , nanotechnology , acoustics , physics , layer (electronics)