Open AccessF2-laser microfabrication of multilevel diffractive optical elements
Author(s) -
Mi Li Ng,
Peter R. Herman,
Amir H. Nejadmalayeri,
J Li
Publication year - 2007
Publication title -
journal of physics. conference series
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/59/1/147
Subject(s) - optics , laser , materials science , surface micromachining , diffraction efficiency , diffraction , wavefront , planar , microfabrication , surface finish , optoelectronics , fabrication , computer science , physics , medicine , alternative medicine , pathology , computer graphics (images) , composite material