Open Access‘‘All-in-One’’ Chip Fabrication by 3D Femtosecond Laser Microprocessing for Biophotonics
Author(s) -
Koji Sugioka,
Ya Cheng,
K. Midorikawa
Publication year - 2007
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/59/1/114
Subject(s) - biophotonics , fabrication , femtosecond , materials science , microfluidics , laser , microfabrication , lab on a chip , etching (microfabrication) , nanotechnology , chip , optoelectronics , optics , photonics , computer science , medicine , telecommunications , alternative medicine , physics , pathology , layer (electronics)