Open AccessNitrogen doping of ZnO thin films grown by plasma-assisted pulsed-laser deposition
Author(s) -
Michal Novotný,
J.-R. Duclère,
Enda McGlynn,
M.O. Henry,
R. O’Haire,
Jean-Paul Mosnier
Publication year - 2007
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/59/1/109
Subject(s) - electron cyclotron resonance , thin film , pulsed laser deposition , materials science , analytical chemistry (journal) , sapphire , doping , plasma , substrate (aquarium) , hall effect , epitaxy , microwave , ion source , laser , optoelectronics , electrical resistivity and conductivity , chemistry , nanotechnology , optics , physics , oceanography , electrical engineering , chromatography , quantum mechanics , engineering , layer (electronics) , geology