Open AccessMicromachining of Silicon Carbide using femtosecond lasers
Author(s) -
Maria Farsari,
George Filippidis,
S. Zoppel,
Georg A. Reider,
C. Fotakis
Publication year - 2007
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/59/1/018
Subject(s) - surface micromachining , femtosecond , silicon carbide , laser , materials science , optoelectronics , wafer , silicon , laser beam machining , optics , x ray laser , laser beams , fabrication , laser power scaling , composite material , physics , medicine , alternative medicine , pathology