Open AccessModule for dielectric surfaces modification by fast neutral particles beams
Author(s) -
V T Barchenko,
A. A. Lisenkov,
N.A. Babinov
Publication year - 2014
Publication title -
journal of physics. conference series
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/567/1/012029
Subject(s) - dielectric , surface modification , materials science , composite material , chemical engineering , optoelectronics , engineering