Open AccessVI Scientific Technical Conference on “Low-temperature plasma during the deposition of functional coatings”
Publication year - 2014
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/567/1/011001
Subject(s) - deposition (geology) , plasma , materials science , engineering physics , nanotechnology , environmental chemistry , chemical engineering , chemistry , environmental science , engineering , physics , geology , nuclear physics , paleontology , sediment