Open AccessEffects of filter gap of cluster-eliminating filter on cluster eliminating efficiency
Author(s) -
Yuji Hashimoto,
Susumu Toko,
Daisuke Yamashita,
Hyunwoong Seo,
Kunihiro Kamataki,
Naho Itagaki,
Kazunori Koga,
Masaharu Shiratani
Publication year - 2014
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/518/1/012007
Subject(s) - cluster (spacecraft) , materials science , filter (signal processing) , substrate (aquarium) , amorphous silicon , silicon , amorphous solid , optoelectronics , chemistry , crystallography , computer science , crystalline silicon , oceanography , computer vision , programming language , geology