Open AccessLow-temperature deposition of ultrathin SiO2films on Si substrates
Author(s) -
P. Vitanov,
A. Harizanova,
T. Ivanova,
Hr Dikov
Publication year - 2014
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/514/1/012010
Subject(s) - materials science , deposition (geology) , chemical engineering , nanotechnology , geology , engineering , paleontology , sediment