Open AccessStructural and electronic properties of anatase Ti1−xFexO2−δthin film prepared by RF magnetron sputtering
Author(s) -
Usui Katsuya,
Teppei Okumura,
Enju Sakai,
Hiroshi Kumigashira,
Tohru Higuchi
Publication year - 2014
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/502/1/012001
Subject(s) - materials science , anatase , thin film , sputter deposition , lattice constant , crystallization , sputtering , fermi level , x ray photoelectron spectroscopy , analytical chemistry (journal) , absorption spectroscopy , substrate (aquarium) , spectral line , condensed matter physics , electron , nuclear magnetic resonance , nanotechnology , optics , diffraction , chemical engineering , chemistry , biochemistry , photocatalysis , catalysis , physics , oceanography , engineering , chromatography , quantum mechanics , astronomy , geology