Open AccessHigh-Bandwidth Dynamic Full-Field Profilometry for Nano-Scale Characterization of MEMS
Author(s) -
Liang-Chia Chen,
YaoTing Huang,
Pi-Bai Chang
Publication year - 2006
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/48/1/197
Subject(s) - profilometer , optics , interferometry , dynamic range , high dynamic range , bandwidth (computing) , materials science , stroboscope , system of measurement , optoelectronics , physics , computer science , surface finish , telecommunications , composite material , astronomy