Open AccessDelayering of Microelectronic Devices Using an Adjustable Broad-Beam Ion Source
Author(s) -
A. C. Robins,
R. R. Cerchiara,
Paul Fischione,
M. Boccabella,
J. M. Matesa,
L. M. Marsh,
Z Zhang
Publication year - 2013
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/471/1/012046
Subject(s) - microelectronics , materials science , ion beam , focused ion beam , ion , optoelectronics , beam (structure) , electrical engineering , optics , engineering , physics , quantum mechanics