Open AccessAdvanced TEM Characterization for the Development of 28-14nm nodes based on fully-depleted Silicon-on-Insulator Technology
Author(s) -
Germain Servanton,
L. Clément,
Kévin Lepinay,
F. Lorut,
R. Pantel,
Alexandre Pofelski,
N. Bicais
Publication year - 2013
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/471/1/012026
Subject(s) - characterization (materials science) , silicon on insulator , materials science , silicon , optoelectronics , engineering physics , nanotechnology , engineering