Open AccessMultislice calculations for quantitative HAADF STEM analysis of germanium diffusion in strained silicon
Author(s) -
Luc Favre
Publication year - 2013
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/471/1/012020
Subject(s) - germanium , scanning transmission electron microscopy , materials science , impurity , silicon , microelectronics , diffusion , analytical chemistry (journal) , transmission electron microscopy , crystallography , molecular physics , optoelectronics , chemistry , nanotechnology , physics , organic chemistry , chromatography , thermodynamics