Open AccessLaboratory x-ray microscopy using a reflection target system and geometric magnification
Author(s) -
Philipp Stahlhut,
Thomas Ebensperger,
Simon Zabler,
Randolf Hanke
Publication year - 2013
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/463/1/012007
Subject(s) - magnification , optics , reflection (computer programming) , structuring , microscopy , process (computing) , computer science , materials science , artificial intelligence , physics , programming language , finance , economics , operating system
This paper describes a laboratory X-ray microscopy setup, based on geometric magnification. The setup uses a sharp metal tip as a reflection target and a highly focused electron beam of a scanning electron microscope. Here we will describe the structuring process for these metal targets. To demonstrate the capabilities of our system, we show radiographs of test structures corresponding to resolutions below 100nm. There are abilities for 3D imaging in later updates of the system. Further we discuss the first imaging examples for high- and low-absorbing samples