Open AccessCharacteristic of VHF plasma produced by balanced power feeding
Author(s) -
Kohei Ogiwara,
W Chen,
Kenji Uchino,
Yoshinobu Kawai
Publication year - 2013
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/441/1/012022
Subject(s) - plasma , power (physics) , environmental science , physics , thermodynamics , nuclear physics