Open AccessSubmicron Wire Fabrication on Silicon Substrate Based on Atomic Force Microscopy Technique
Author(s) -
M. T. Asmah,
Sabar D. Hutagalung,
Othman Sidek
Publication year - 2013
Publication title -
journal of physics. conference series
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/431/1/012005
Subject(s) - fabrication , silicon , materials science , substrate (aquarium) , anode , optoelectronics , conductive atomic force microscopy , relative humidity , atomic force microscopy , nanotechnology , electrode , chemistry , medicine , oceanography , alternative medicine , physics , pathology , thermodynamics , geology