Open AccessFabrication of (Cu, C)Ba2CuOy superconducting thin film by RF magnetron sputtering
Author(s) -
Hiroki Wakamatsu,
Takafumi Ogata,
Naohiro Yamaguchi,
S. Mikusu,
Kazuyasu Tokiwa,
Tsuneo Watanabe,
Kotaro Ohki,
Kazuya Kikunaga,
Norio Terada,
Naoto Kikuchi,
Y. Tanaka,
Akira Iyo
Publication year - 2006
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/43/1/072
Subject(s) - thin film , sputter deposition , materials science , superconductivity , sputtering , fabrication , cavity magnetron , epitaxy , analytical chemistry (journal) , deposition (geology) , torr , transition temperature , optoelectronics , condensed matter physics , nanotechnology , chemistry , physics , layer (electronics) , medicine , thermodynamics , paleontology , alternative medicine , pathology , chromatography , sediment , biology