Open AccessThe Effect of Substrate on the Low-Temperature Carbon Nanomaterials Growth by Microwave Excited Surface-wave Plasma Chemical Vapor Deposition
Author(s) -
Raman Bekarevich,
Shota Miura,
Kazuhíde Oginö,
Aliaksandr Rahachou,
Masaaki Nagatsu
Publication year - 2013
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/417/1/012042
Subject(s) - nanomaterials , chemical vapor deposition , plasma , microwave , excited state , materials science , carbon fibers , substrate (aquarium) , deposition (geology) , plasma enhanced chemical vapor deposition , chemical engineering , analytical chemistry (journal) , nanotechnology , chemistry , environmental chemistry , atomic physics , composite material , physics , oceanography , quantum mechanics , geology , composite number , engineering , paleontology , sediment , biology