Open AccessCorrelation between the electrical and structural properties of aluminium-doped ZnO thin films obtained by direct current magnetron sputtering
Author(s) -
L. Avril,
Philippe Guaino,
Fabrizio Maseri,
K. Muthukaruppasamy,
JeanJacques Pireaux
Publication year - 2013
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/417/1/012011
Subject(s) - materials science , scanning electron microscope , electrical resistivity and conductivity , sputter deposition , substrate (aquarium) , doping , aluminium , thin film , sputtering , direct current , analytical chemistry (journal) , cavity magnetron , conductivity , diffraction , transmittance , composite material , optoelectronics , optics , nanotechnology , chemistry , oceanography , physics , chromatography , quantum mechanics , voltage , geology , electrical engineering , engineering