Open AccessMolecular-Dynamics Study of Void-Formation inside Silicon Wafers in Stealth Dicing
Author(s) -
Kohei Shimamura,
Junji Okuma,
Satoshi Ohmura,
Fuyuki Shimojo
Publication year - 2012
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/402/1/012044
Subject(s) - wafer dicing , wafer , void (composites) , materials science , silicon , molecular dynamics , nanotechnology , composite material , optoelectronics , chemistry , computational chemistry