Open AccessNano-scale view of atom intermixing at metal/semiconductor interfaces
Author(s) -
Takashi Nakayama,
S. Itaya,
D Murayama
Publication year - 2006
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/38/1/052
Subject(s) - electronegativity , materials science , atom (system on chip) , semiconductor , atomic units , silicon , atomic radius , valence electron , metal , nanoscopic scale , electron , condensed matter physics , chemical physics , nanotechnology , atomic physics , optoelectronics , chemistry , metallurgy , physics , organic chemistry , quantum mechanics , computer science , embedded system